8/3/2010	12:26:45 AM	Program started after a nonstandard shutdown
8/3/2010	12:26:45 AM	Helium valve closed
8/3/2010	12:26:45 AM	H2 valve closed
8/3/2010	12:26:45 AM	BCl3 valve closed
8/3/2010	12:26:45 AM	PH3 valve closed
8/3/2010	12:26:45 AM	SiCl4 pre valve closed
8/3/2010	12:26:45 AM	SiCl4 post valve closed
8/3/2010	12:26:45 AM	Main Vac valve closed
8/3/2010	12:26:45 AM	Bypass valve closed
8/3/2010	12:26:45 AM	Bubbler valve closed
8/3/2010	12:26:45 AM	Helium MFC set to  0.000000
8/3/2010	12:26:45 AM	H2 MFC set to  0.000000
8/3/2010	12:26:45 AM	BCl3 MFC set to  0.000000
8/3/2010	12:26:45 AM	PHl3 MFC set to  0.000000
8/3/2010	12:26:45 AM	SiCl4 MFC set to  0.000000
8/3/2010	12:26:45 AM	Bypass solenoid MFC set to  760.000000
8/3/2010	12:26:45 AM	Tube furnace set to 0
8/3/2010	12:26:47 AM	Main Vac valve opened
8/3/2010	12:26:47 AM	Bypass valve opened
8/3/2010	12:27:25 AM	Bypass valve closed
8/3/2010	12:27:25 AM	Main Vac valve closed
8/3/2010	12:27:44 AM	Bypass valve opened
8/3/2010	12:27:44 AM	Main Vac valve opened
8/3/2010	12:28:31 AM	Recipe started at 12:28 AM
8/3/2010	12:28:31 AM	Helium valve closed
8/3/2010	12:28:31 AM	BCl3 valve closed
8/3/2010	12:28:31 AM	PH3 valve closed
8/3/2010	12:28:31 AM	SiCl4 pre valve closed
8/3/2010	12:28:31 AM	SiCl4 post valve closed
8/3/2010	12:28:31 AM	Main Vac valve closed
8/3/2010	12:28:31 AM	Bypass valve closed
8/3/2010	12:28:31 AM	Bubbler valve closed
8/3/2010	12:28:31 AM	H2 valve opened
8/3/2010	12:28:31 AM	Helium MFC set to  0.000000
8/3/2010	12:28:31 AM	H2 MFC set to  500.000000
8/3/2010	12:28:31 AM	BCl3 MFC set to  0.000000
8/3/2010	12:28:31 AM	PHl3 MFC set to  0.000000
8/3/2010	12:28:31 AM	SiCl4 MFC set to  0.000000
8/3/2010	12:28:31 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	12:28:31 AM	Tube furnace set to 0
8/3/2010	12:29:50 AM	Helium valve closed
8/3/2010	12:29:50 AM	BCl3 valve closed
8/3/2010	12:29:50 AM	PH3 valve closed
8/3/2010	12:29:50 AM	SiCl4 pre valve closed
8/3/2010	12:29:50 AM	SiCl4 post valve closed
8/3/2010	12:29:50 AM	Main Vac valve closed
8/3/2010	12:29:50 AM	Bypass valve closed
8/3/2010	12:29:50 AM	H2 valve opened
8/3/2010	12:29:50 AM	Bubbler valve opened
8/3/2010	12:29:50 AM	Helium MFC set to  0.000000
8/3/2010	12:29:50 AM	H2 MFC set to  500.000000
8/3/2010	12:29:50 AM	BCl3 MFC set to  0.000000
8/3/2010	12:29:50 AM	PHl3 MFC set to  0.000000
8/3/2010	12:29:50 AM	SiCl4 MFC set to  0.000000
8/3/2010	12:29:50 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	12:29:51 AM	Tube furnace set to 1000
8/3/2010	12:49:51 AM	Helium valve closed
8/3/2010	12:49:51 AM	BCl3 valve closed
8/3/2010	12:49:51 AM	PH3 valve closed
8/3/2010	12:49:51 AM	Main Vac valve closed
8/3/2010	12:49:51 AM	Bypass valve closed
8/3/2010	12:49:51 AM	H2 valve opened
8/3/2010	12:49:51 AM	SiCl4 pre valve opened
8/3/2010	12:49:51 AM	SiCl4 post valve opened
8/3/2010	12:49:51 AM	Bubbler valve opened
8/3/2010	12:49:51 AM	Helium MFC set to  0.000000
8/3/2010	12:49:51 AM	H2 MFC set to  500.000000
8/3/2010	12:49:51 AM	BCl3 MFC set to  0.000000
8/3/2010	12:49:51 AM	PHl3 MFC set to  0.000000
8/3/2010	12:49:51 AM	SiCl4 MFC set to  50.000000
8/3/2010	12:49:51 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	12:49:51 AM	Tube furnace set to 1000
8/3/2010	1:09:51 AM	H2 valve closed
8/3/2010	1:09:51 AM	BCl3 valve closed
8/3/2010	1:09:51 AM	PH3 valve closed
8/3/2010	1:09:51 AM	SiCl4 pre valve closed
8/3/2010	1:09:51 AM	SiCl4 post valve closed
8/3/2010	1:09:51 AM	Main Vac valve closed
8/3/2010	1:09:51 AM	Bypass valve closed
8/3/2010	1:09:51 AM	Helium valve opened
8/3/2010	1:09:51 AM	Bubbler valve opened
8/3/2010	1:09:51 AM	Helium MFC set to  500.000000
8/3/2010	1:09:51 AM	H2 MFC set to  0.000000
8/3/2010	1:09:51 AM	BCl3 MFC set to  0.000000
8/3/2010	1:09:51 AM	PHl3 MFC set to  0.000000
8/3/2010	1:09:51 AM	SiCl4 MFC set to  0.000000
8/3/2010	1:09:51 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	1:09:51 AM	Tube furnace set to 750
8/3/2010	1:29:51 AM	H2 valve closed
8/3/2010	1:29:51 AM	BCl3 valve closed
8/3/2010	1:29:51 AM	PH3 valve closed
8/3/2010	1:29:51 AM	SiCl4 pre valve closed
8/3/2010	1:29:51 AM	SiCl4 post valve closed
8/3/2010	1:29:51 AM	Main Vac valve closed
8/3/2010	1:29:51 AM	Bypass valve closed
8/3/2010	1:29:51 AM	Helium valve opened
8/3/2010	1:29:51 AM	Bubbler valve opened
8/3/2010	1:29:51 AM	Helium MFC set to  500.000000
8/3/2010	1:29:51 AM	H2 MFC set to  0.000000
8/3/2010	1:29:51 AM	BCl3 MFC set to  0.000000
8/3/2010	1:29:51 AM	PHl3 MFC set to  0.000000
8/3/2010	1:29:51 AM	SiCl4 MFC set to  0.000000
8/3/2010	1:29:51 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	1:29:51 AM	Tube furnace set to 0
8/3/2010	1:49:51 AM	Helium valve closed
8/3/2010	1:49:51 AM	H2 valve closed
8/3/2010	1:49:51 AM	BCl3 valve closed
8/3/2010	1:49:51 AM	PH3 valve closed
8/3/2010	1:49:51 AM	SiCl4 pre valve closed
8/3/2010	1:49:51 AM	SiCl4 post valve closed
8/3/2010	1:49:51 AM	Main Vac valve closed
8/3/2010	1:49:51 AM	Bypass valve closed
8/3/2010	1:49:51 AM	Bubbler valve closed
8/3/2010	1:49:51 AM	Helium MFC set to  0.000000
8/3/2010	1:49:51 AM	H2 MFC set to  0.000000
8/3/2010	1:49:51 AM	BCl3 MFC set to  0.000000
8/3/2010	1:49:51 AM	PHl3 MFC set to  0.000000
8/3/2010	1:49:51 AM	SiCl4 MFC set to  0.000000
8/3/2010	1:49:51 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	1:49:51 AM	Tube furnace set to 0
8/3/2010	1:49:52 AM	Run finished at 1:49 AM
8/3/2010	2:23:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2010	2:23:19 AM	Recipe started at 2:23 AM
8/3/2010	2:23:19 AM	H2 valve closed
8/3/2010	2:23:19 AM	BCl3 valve closed
8/3/2010	2:23:19 AM	PH3 valve closed
8/3/2010	2:23:19 AM	SiCl4 pre valve closed
8/3/2010	2:23:19 AM	SiCl4 post valve closed
8/3/2010	2:23:19 AM	Main Vac valve closed
8/3/2010	2:23:19 AM	Bypass valve closed
8/3/2010	2:23:19 AM	Bubbler valve closed
8/3/2010	2:23:19 AM	Helium valve opened
8/3/2010	2:23:19 AM	Helium MFC set to  500.000000
8/3/2010	2:23:19 AM	H2 MFC set to  0.000000
8/3/2010	2:23:19 AM	BCl3 MFC set to  0.000000
8/3/2010	2:23:19 AM	PHl3 MFC set to  0.000000
8/3/2010	2:23:19 AM	SiCl4 MFC set to  0.000000
8/3/2010	2:23:19 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	2:23:19 AM	Tube furnace set to 0
8/3/2010	2:23:20 AM	Helium valve closed
8/3/2010	2:23:20 AM	H2 valve closed
8/3/2010	2:23:20 AM	BCl3 valve closed
8/3/2010	2:23:20 AM	PH3 valve closed
8/3/2010	2:23:20 AM	SiCl4 pre valve closed
8/3/2010	2:23:20 AM	SiCl4 post valve closed
8/3/2010	2:23:20 AM	Main Vac valve closed
8/3/2010	2:23:20 AM	Bypass valve closed
8/3/2010	2:23:20 AM	Bubbler valve closed
8/3/2010	2:23:20 AM	Helium MFC set to  0.000000
8/3/2010	2:23:20 AM	H2 MFC set to  0.000000
8/3/2010	2:23:20 AM	BCl3 MFC set to  0.000000
8/3/2010	2:23:20 AM	PHl3 MFC set to  0.000000
8/3/2010	2:23:20 AM	SiCl4 MFC set to  0.000000
8/3/2010	2:23:20 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	2:23:20 AM	Tube furnace set to 0
8/3/2010	2:23:21 AM	Run finished at 2:23 AM
8/3/2010	2:23:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2010	2:41:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2010	2:41:44 AM	Recipe started at 2:41 AM
8/3/2010	2:41:44 AM	Helium valve closed
8/3/2010	2:41:44 AM	H2 valve closed
8/3/2010	2:41:44 AM	BCl3 valve closed
8/3/2010	2:41:44 AM	PH3 valve closed
8/3/2010	2:41:44 AM	SiCl4 pre valve closed
8/3/2010	2:41:44 AM	SiCl4 post valve closed
8/3/2010	2:41:44 AM	Main Vac valve closed
8/3/2010	2:41:44 AM	Bubbler valve closed
8/3/2010	2:41:44 AM	Bypass valve opened
8/3/2010	2:41:44 AM	Helium MFC set to  0.000000
8/3/2010	2:41:44 AM	H2 MFC set to  0.000000
8/3/2010	2:41:44 AM	BCl3 MFC set to  0.000000
8/3/2010	2:41:44 AM	PHl3 MFC set to  0.000000
8/3/2010	2:41:44 AM	SiCl4 MFC set to  0.000000
8/3/2010	2:41:44 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	2:41:44 AM	Tube furnace set to 0
8/3/2010	2:42:22 AM	Helium valve closed
8/3/2010	2:42:22 AM	H2 valve closed
8/3/2010	2:42:22 AM	BCl3 valve closed
8/3/2010	2:42:22 AM	PH3 valve closed
8/3/2010	2:42:22 AM	SiCl4 pre valve closed
8/3/2010	2:42:22 AM	SiCl4 post valve closed
8/3/2010	2:42:22 AM	Bubbler valve closed
8/3/2010	2:42:22 AM	Main Vac valve opened
8/3/2010	2:42:22 AM	Bypass valve opened
8/3/2010	2:42:22 AM	Helium MFC set to  0.000000
8/3/2010	2:42:22 AM	H2 MFC set to  0.000000
8/3/2010	2:42:22 AM	BCl3 MFC set to  0.000000
8/3/2010	2:42:22 AM	PHl3 MFC set to  0.000000
8/3/2010	2:42:22 AM	SiCl4 MFC set to  0.000000
8/3/2010	2:42:22 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	2:42:22 AM	Tube furnace set to 0
8/3/2010	2:42:23 AM	Run finished at 2:42 AM
8/3/2010	2:42:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2010	2:47:24 AM	Recipe started at 2:47 AM
8/3/2010	2:47:24 AM	Helium valve closed
8/3/2010	2:47:24 AM	H2 valve closed
8/3/2010	2:47:24 AM	BCl3 valve closed
8/3/2010	2:47:24 AM	PH3 valve closed
8/3/2010	2:47:24 AM	SiCl4 pre valve closed
8/3/2010	2:47:24 AM	SiCl4 post valve closed
8/3/2010	2:47:24 AM	Main Vac valve closed
8/3/2010	2:47:24 AM	Bubbler valve closed
8/3/2010	2:47:24 AM	Bypass valve opened
8/3/2010	2:47:24 AM	Helium MFC set to  0.000000
8/3/2010	2:47:24 AM	H2 MFC set to  0.000000
8/3/2010	2:47:24 AM	BCl3 MFC set to  0.000000
8/3/2010	2:47:24 AM	PHl3 MFC set to  0.000000
8/3/2010	2:47:24 AM	SiCl4 MFC set to  0.000000
8/3/2010	2:47:24 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	2:47:24 AM	Tube furnace set to 100
8/3/2010	2:47:24 AM	Helium valve closed
8/3/2010	2:47:24 AM	H2 valve closed
8/3/2010	2:47:24 AM	BCl3 valve closed
8/3/2010	2:47:24 AM	PH3 valve closed
8/3/2010	2:47:24 AM	SiCl4 pre valve closed
8/3/2010	2:47:24 AM	SiCl4 post valve closed
8/3/2010	2:47:24 AM	Bubbler valve closed
8/3/2010	2:47:24 AM	Main Vac valve opened
8/3/2010	2:47:24 AM	Bypass valve opened
8/3/2010	2:47:24 AM	Helium MFC set to  0.000000
8/3/2010	2:47:24 AM	H2 MFC set to  0.000000
8/3/2010	2:47:24 AM	BCl3 MFC set to  0.000000
8/3/2010	2:47:24 AM	PHl3 MFC set to  0.000000
8/3/2010	2:47:24 AM	SiCl4 MFC set to  0.000000
8/3/2010	2:47:24 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	2:47:24 AM	Tube furnace set to 100
8/3/2010	2:47:29 AM	H2 valve closed
8/3/2010	2:47:29 AM	BCl3 valve closed
8/3/2010	2:47:29 AM	PH3 valve closed
8/3/2010	2:47:29 AM	SiCl4 pre valve closed
8/3/2010	2:47:29 AM	SiCl4 post valve closed
8/3/2010	2:47:29 AM	Bubbler valve closed
8/3/2010	2:47:29 AM	Helium valve opened
8/3/2010	2:47:29 AM	Main Vac valve opened
8/3/2010	2:47:29 AM	Bypass valve opened
8/3/2010	2:47:29 AM	Helium MFC set to  100.000000
8/3/2010	2:47:29 AM	H2 MFC set to  0.000000
8/3/2010	2:47:29 AM	BCl3 MFC set to  0.000000
8/3/2010	2:47:29 AM	PHl3 MFC set to  0.000000
8/3/2010	2:47:29 AM	SiCl4 MFC set to  0.000000
8/3/2010	2:47:29 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	2:47:30 AM	Tube furnace set to 100
8/3/2010	2:56:30 AM	Helium valve closed
8/3/2010	2:56:30 AM	H2 valve closed
8/3/2010	2:56:30 AM	BCl3 valve closed
8/3/2010	2:56:30 AM	PH3 valve closed
8/3/2010	2:56:30 AM	SiCl4 pre valve closed
8/3/2010	2:56:30 AM	SiCl4 post valve closed
8/3/2010	2:56:30 AM	Bubbler valve closed
8/3/2010	2:56:30 AM	Main Vac valve opened
8/3/2010	2:56:30 AM	Bypass valve opened
8/3/2010	2:56:30 AM	Helium MFC set to  0.000000
8/3/2010	2:56:30 AM	H2 MFC set to  0.000000
8/3/2010	2:56:30 AM	BCl3 MFC set to  0.000000
8/3/2010	2:56:30 AM	PHl3 MFC set to  0.000000
8/3/2010	2:56:30 AM	SiCl4 MFC set to  0.000000
8/3/2010	2:56:30 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	2:56:30 AM	Tube furnace set to 100
8/3/2010	2:57:30 AM	H2 valve closed
8/3/2010	2:57:30 AM	BCl3 valve closed
8/3/2010	2:57:30 AM	PH3 valve closed
8/3/2010	2:57:30 AM	SiCl4 pre valve closed
8/3/2010	2:57:30 AM	SiCl4 post valve closed
8/3/2010	2:57:30 AM	Bubbler valve closed
8/3/2010	2:57:30 AM	Helium valve opened
8/3/2010	2:57:30 AM	Main Vac valve opened
8/3/2010	2:57:30 AM	Bypass valve opened
8/3/2010	2:57:30 AM	Helium MFC set to  100.000000
8/3/2010	2:57:30 AM	H2 MFC set to  0.000000
8/3/2010	2:57:30 AM	BCl3 MFC set to  0.000000
8/3/2010	2:57:30 AM	PHl3 MFC set to  0.000000
8/3/2010	2:57:30 AM	SiCl4 MFC set to  0.000000
8/3/2010	2:57:30 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	2:57:30 AM	Tube furnace set to 100
8/3/2010	3:06:30 AM	Helium valve closed
8/3/2010	3:06:30 AM	H2 valve closed
8/3/2010	3:06:30 AM	BCl3 valve closed
8/3/2010	3:06:30 AM	PH3 valve closed
8/3/2010	3:06:30 AM	SiCl4 pre valve closed
8/3/2010	3:06:30 AM	SiCl4 post valve closed
8/3/2010	3:06:30 AM	Bubbler valve closed
8/3/2010	3:06:30 AM	Main Vac valve opened
8/3/2010	3:06:30 AM	Bypass valve opened
8/3/2010	3:06:30 AM	Helium MFC set to  0.000000
8/3/2010	3:06:30 AM	H2 MFC set to  0.000000
8/3/2010	3:06:30 AM	BCl3 MFC set to  0.000000
8/3/2010	3:06:30 AM	PHl3 MFC set to  0.000000
8/3/2010	3:06:30 AM	SiCl4 MFC set to  0.000000
8/3/2010	3:06:30 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:06:30 AM	Tube furnace set to 100
8/3/2010	3:07:30 AM	H2 valve closed
8/3/2010	3:07:30 AM	BCl3 valve closed
8/3/2010	3:07:30 AM	PH3 valve closed
8/3/2010	3:07:30 AM	SiCl4 pre valve closed
8/3/2010	3:07:30 AM	SiCl4 post valve closed
8/3/2010	3:07:30 AM	Bubbler valve closed
8/3/2010	3:07:30 AM	Helium valve opened
8/3/2010	3:07:30 AM	Main Vac valve opened
8/3/2010	3:07:30 AM	Bypass valve opened
8/3/2010	3:07:30 AM	Helium MFC set to  100.000000
8/3/2010	3:07:30 AM	H2 MFC set to  0.000000
8/3/2010	3:07:30 AM	BCl3 MFC set to  0.000000
8/3/2010	3:07:30 AM	PHl3 MFC set to  0.000000
8/3/2010	3:07:30 AM	SiCl4 MFC set to  0.000000
8/3/2010	3:07:30 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:07:30 AM	Tube furnace set to 100
8/3/2010	3:16:30 AM	Helium valve closed
8/3/2010	3:16:30 AM	H2 valve closed
8/3/2010	3:16:30 AM	BCl3 valve closed
8/3/2010	3:16:30 AM	PH3 valve closed
8/3/2010	3:16:30 AM	SiCl4 pre valve closed
8/3/2010	3:16:30 AM	SiCl4 post valve closed
8/3/2010	3:16:30 AM	Bubbler valve closed
8/3/2010	3:16:30 AM	Main Vac valve opened
8/3/2010	3:16:30 AM	Bypass valve opened
8/3/2010	3:16:30 AM	Helium MFC set to  0.000000
8/3/2010	3:16:30 AM	H2 MFC set to  0.000000
8/3/2010	3:16:30 AM	BCl3 MFC set to  0.000000
8/3/2010	3:16:30 AM	PHl3 MFC set to  0.000000
8/3/2010	3:16:30 AM	SiCl4 MFC set to  0.000000
8/3/2010	3:16:30 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:16:31 AM	Tube furnace set to 100
8/3/2010	3:17:31 AM	H2 valve closed
8/3/2010	3:17:31 AM	BCl3 valve closed
8/3/2010	3:17:31 AM	PH3 valve closed
8/3/2010	3:17:31 AM	SiCl4 pre valve closed
8/3/2010	3:17:31 AM	SiCl4 post valve closed
8/3/2010	3:17:31 AM	Bubbler valve closed
8/3/2010	3:17:31 AM	Helium valve opened
8/3/2010	3:17:31 AM	Main Vac valve opened
8/3/2010	3:17:31 AM	Bypass valve opened
8/3/2010	3:17:31 AM	Helium MFC set to  100.000000
8/3/2010	3:17:31 AM	H2 MFC set to  0.000000
8/3/2010	3:17:31 AM	BCl3 MFC set to  0.000000
8/3/2010	3:17:31 AM	PHl3 MFC set to  0.000000
8/3/2010	3:17:31 AM	SiCl4 MFC set to  0.000000
8/3/2010	3:17:31 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:17:31 AM	Tube furnace set to 100
8/3/2010	3:26:31 AM	Helium valve closed
8/3/2010	3:26:31 AM	H2 valve closed
8/3/2010	3:26:31 AM	BCl3 valve closed
8/3/2010	3:26:31 AM	PH3 valve closed
8/3/2010	3:26:31 AM	SiCl4 pre valve closed
8/3/2010	3:26:31 AM	SiCl4 post valve closed
8/3/2010	3:26:31 AM	Bubbler valve closed
8/3/2010	3:26:31 AM	Main Vac valve opened
8/3/2010	3:26:31 AM	Bypass valve opened
8/3/2010	3:26:31 AM	Helium MFC set to  0.000000
8/3/2010	3:26:31 AM	H2 MFC set to  0.000000
8/3/2010	3:26:31 AM	BCl3 MFC set to  0.000000
8/3/2010	3:26:31 AM	PHl3 MFC set to  0.000000
8/3/2010	3:26:31 AM	SiCl4 MFC set to  0.000000
8/3/2010	3:26:31 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:26:31 AM	Tube furnace set to 100
8/3/2010	3:27:31 AM	H2 valve closed
8/3/2010	3:27:31 AM	BCl3 valve closed
8/3/2010	3:27:31 AM	PH3 valve closed
8/3/2010	3:27:31 AM	SiCl4 pre valve closed
8/3/2010	3:27:31 AM	SiCl4 post valve closed
8/3/2010	3:27:31 AM	Bubbler valve closed
8/3/2010	3:27:31 AM	Helium valve opened
8/3/2010	3:27:31 AM	Main Vac valve opened
8/3/2010	3:27:31 AM	Bypass valve opened
8/3/2010	3:27:31 AM	Helium MFC set to  100.000000
8/3/2010	3:27:31 AM	H2 MFC set to  0.000000
8/3/2010	3:27:31 AM	BCl3 MFC set to  0.000000
8/3/2010	3:27:31 AM	PHl3 MFC set to  0.000000
8/3/2010	3:27:31 AM	SiCl4 MFC set to  0.000000
8/3/2010	3:27:31 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:27:31 AM	Tube furnace set to 100
8/3/2010	3:36:31 AM	Helium valve closed
8/3/2010	3:36:31 AM	H2 valve closed
8/3/2010	3:36:31 AM	BCl3 valve closed
8/3/2010	3:36:31 AM	PH3 valve closed
8/3/2010	3:36:31 AM	SiCl4 pre valve closed
8/3/2010	3:36:31 AM	SiCl4 post valve closed
8/3/2010	3:36:31 AM	Bubbler valve closed
8/3/2010	3:36:31 AM	Main Vac valve opened
8/3/2010	3:36:31 AM	Bypass valve opened
8/3/2010	3:36:31 AM	Helium MFC set to  0.000000
8/3/2010	3:36:31 AM	H2 MFC set to  0.000000
8/3/2010	3:36:31 AM	BCl3 MFC set to  0.000000
8/3/2010	3:36:31 AM	PHl3 MFC set to  0.000000
8/3/2010	3:36:31 AM	SiCl4 MFC set to  0.000000
8/3/2010	3:36:31 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:36:31 AM	Tube furnace set to 100
8/3/2010	3:37:31 AM	H2 valve closed
8/3/2010	3:37:31 AM	BCl3 valve closed
8/3/2010	3:37:31 AM	PH3 valve closed
8/3/2010	3:37:31 AM	SiCl4 pre valve closed
8/3/2010	3:37:31 AM	SiCl4 post valve closed
8/3/2010	3:37:31 AM	Bubbler valve closed
8/3/2010	3:37:31 AM	Helium valve opened
8/3/2010	3:37:31 AM	Main Vac valve opened
8/3/2010	3:37:31 AM	Bypass valve opened
8/3/2010	3:37:31 AM	Helium MFC set to  100.000000
8/3/2010	3:37:31 AM	H2 MFC set to  0.000000
8/3/2010	3:37:31 AM	BCl3 MFC set to  0.000000
8/3/2010	3:37:31 AM	PHl3 MFC set to  0.000000
8/3/2010	3:37:31 AM	SiCl4 MFC set to  0.000000
8/3/2010	3:37:31 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:37:31 AM	Tube furnace set to 100
8/3/2010	3:46:31 AM	Helium valve closed
8/3/2010	3:46:31 AM	H2 valve closed
8/3/2010	3:46:31 AM	BCl3 valve closed
8/3/2010	3:46:31 AM	PH3 valve closed
8/3/2010	3:46:31 AM	SiCl4 pre valve closed
8/3/2010	3:46:31 AM	SiCl4 post valve closed
8/3/2010	3:46:31 AM	Bubbler valve closed
8/3/2010	3:46:31 AM	Main Vac valve opened
8/3/2010	3:46:31 AM	Bypass valve opened
8/3/2010	3:46:31 AM	Helium MFC set to  0.000000
8/3/2010	3:46:31 AM	H2 MFC set to  0.000000
8/3/2010	3:46:31 AM	BCl3 MFC set to  0.000000
8/3/2010	3:46:31 AM	PHl3 MFC set to  0.000000
8/3/2010	3:46:31 AM	SiCl4 MFC set to  0.000000
8/3/2010	3:46:31 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:46:32 AM	Tube furnace set to 100
8/3/2010	3:46:33 AM	Run finished at 3:46 AM
8/3/2010	4:25:39 AM	Helium MFC set to  100.000000
8/3/2010	4:25:41 AM	Helium valve opened
8/3/2010	4:27:20 AM	Helium valve closed
8/3/2010	4:28:30 AM	Bypass valve closed
8/3/2010	4:28:31 AM	Main Vac valve closed
8/3/2010	4:29:07 AM	Bypass valve opened
8/3/2010	4:29:07 AM	Main Vac valve opened
8/3/2010	4:29:08 AM	Helium valve opened
8/3/2010	4:30:23 AM	Helium valve closed
8/3/2010	4:31:34 AM	Bypass valve closed
8/3/2010	4:31:35 AM	Main Vac valve closed
8/3/2010	4:31:56 AM	Bypass valve opened
8/3/2010	4:31:57 AM	Main Vac valve opened
8/3/2010	4:32:07 AM	Helium valve opened
8/3/2010	4:32:55 AM	Helium valve closed
8/3/2010	4:33:59 AM	Recipe started at 4:33 AM
8/3/2010	4:33:59 AM	Helium valve closed
8/3/2010	4:33:59 AM	BCl3 valve closed
8/3/2010	4:33:59 AM	PH3 valve closed
8/3/2010	4:33:59 AM	SiCl4 pre valve closed
8/3/2010	4:33:59 AM	SiCl4 post valve closed
8/3/2010	4:33:59 AM	Main Vac valve closed
8/3/2010	4:33:59 AM	Bypass valve closed
8/3/2010	4:33:59 AM	Bubbler valve closed
8/3/2010	4:33:59 AM	H2 valve opened
8/3/2010	4:33:59 AM	Helium MFC set to  0.000000
8/3/2010	4:33:59 AM	H2 MFC set to  500.000000
8/3/2010	4:33:59 AM	BCl3 MFC set to  0.000000
8/3/2010	4:33:59 AM	PHl3 MFC set to  0.000000
8/3/2010	4:33:59 AM	SiCl4 MFC set to  0.000000
8/3/2010	4:33:59 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	4:34:00 AM	Tube furnace set to 0
8/3/2010	4:35:19 AM	Helium valve closed
8/3/2010	4:35:19 AM	BCl3 valve closed
8/3/2010	4:35:19 AM	PH3 valve closed
8/3/2010	4:35:19 AM	SiCl4 pre valve closed
8/3/2010	4:35:19 AM	SiCl4 post valve closed
8/3/2010	4:35:19 AM	Main Vac valve closed
8/3/2010	4:35:19 AM	Bypass valve closed
8/3/2010	4:35:19 AM	H2 valve opened
8/3/2010	4:35:19 AM	Bubbler valve opened
8/3/2010	4:35:19 AM	Helium MFC set to  0.000000
8/3/2010	4:35:19 AM	H2 MFC set to  500.000000
8/3/2010	4:35:19 AM	BCl3 MFC set to  0.000000
8/3/2010	4:35:19 AM	PHl3 MFC set to  0.000000
8/3/2010	4:35:19 AM	SiCl4 MFC set to  0.000000
8/3/2010	4:35:19 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	4:35:20 AM	Tube furnace set to 1000
8/3/2010	4:55:20 AM	Helium valve closed
8/3/2010	4:55:20 AM	BCl3 valve closed
8/3/2010	4:55:20 AM	PH3 valve closed
8/3/2010	4:55:20 AM	Main Vac valve closed
8/3/2010	4:55:20 AM	Bypass valve closed
8/3/2010	4:55:20 AM	H2 valve opened
8/3/2010	4:55:20 AM	SiCl4 pre valve opened
8/3/2010	4:55:20 AM	SiCl4 post valve opened
8/3/2010	4:55:20 AM	Bubbler valve opened
8/3/2010	4:55:20 AM	Helium MFC set to  0.000000
8/3/2010	4:55:20 AM	H2 MFC set to  500.000000
8/3/2010	4:55:20 AM	BCl3 MFC set to  0.000000
8/3/2010	4:55:20 AM	PHl3 MFC set to  0.000000
8/3/2010	4:55:20 AM	SiCl4 MFC set to  50.000000
8/3/2010	4:55:20 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	4:55:20 AM	Tube furnace set to 1000
8/3/2010	5:15:20 AM	H2 valve closed
8/3/2010	5:15:20 AM	BCl3 valve closed
8/3/2010	5:15:20 AM	PH3 valve closed
8/3/2010	5:15:20 AM	SiCl4 pre valve closed
8/3/2010	5:15:20 AM	SiCl4 post valve closed
8/3/2010	5:15:20 AM	Main Vac valve closed
8/3/2010	5:15:20 AM	Bypass valve closed
8/3/2010	5:15:20 AM	Helium valve opened
8/3/2010	5:15:20 AM	Bubbler valve opened
8/3/2010	5:15:20 AM	Helium MFC set to  500.000000
8/3/2010	5:15:20 AM	H2 MFC set to  0.000000
8/3/2010	5:15:20 AM	BCl3 MFC set to  0.000000
8/3/2010	5:15:20 AM	PHl3 MFC set to  0.000000
8/3/2010	5:15:20 AM	SiCl4 MFC set to  0.000000
8/3/2010	5:15:20 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	5:15:20 AM	Tube furnace set to 750
8/3/2010	5:35:20 AM	H2 valve closed
8/3/2010	5:35:20 AM	BCl3 valve closed
8/3/2010	5:35:20 AM	PH3 valve closed
8/3/2010	5:35:20 AM	SiCl4 pre valve closed
8/3/2010	5:35:20 AM	SiCl4 post valve closed
8/3/2010	5:35:20 AM	Main Vac valve closed
8/3/2010	5:35:20 AM	Bypass valve closed
8/3/2010	5:35:20 AM	Helium valve opened
8/3/2010	5:35:20 AM	Bubbler valve opened
8/3/2010	5:35:20 AM	Helium MFC set to  500.000000
8/3/2010	5:35:20 AM	H2 MFC set to  0.000000
8/3/2010	5:35:20 AM	BCl3 MFC set to  0.000000
8/3/2010	5:35:20 AM	PHl3 MFC set to  0.000000
8/3/2010	5:35:20 AM	SiCl4 MFC set to  0.000000
8/3/2010	5:35:20 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	5:35:20 AM	Tube furnace set to 0
8/3/2010	5:55:20 AM	Helium valve closed
8/3/2010	5:55:20 AM	H2 valve closed
8/3/2010	5:55:20 AM	BCl3 valve closed
8/3/2010	5:55:20 AM	PH3 valve closed
8/3/2010	5:55:20 AM	SiCl4 pre valve closed
8/3/2010	5:55:20 AM	SiCl4 post valve closed
8/3/2010	5:55:20 AM	Main Vac valve closed
8/3/2010	5:55:20 AM	Bypass valve closed
8/3/2010	5:55:20 AM	Bubbler valve closed
8/3/2010	5:55:20 AM	Helium MFC set to  0.000000
8/3/2010	5:55:20 AM	H2 MFC set to  0.000000
8/3/2010	5:55:20 AM	BCl3 MFC set to  0.000000
8/3/2010	5:55:20 AM	PHl3 MFC set to  0.000000
8/3/2010	5:55:20 AM	SiCl4 MFC set to  0.000000
8/3/2010	5:55:20 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	5:55:20 AM	Tube furnace set to 0
8/3/2010	5:55:20 AM	Run finished at 5:55 AM
8/3/2010	6:37:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2010	6:37:10 AM	Recipe started at 6:37 AM
8/3/2010	6:37:10 AM	H2 valve closed
8/3/2010	6:37:10 AM	BCl3 valve closed
8/3/2010	6:37:10 AM	PH3 valve closed
8/3/2010	6:37:10 AM	SiCl4 pre valve closed
8/3/2010	6:37:10 AM	SiCl4 post valve closed
8/3/2010	6:37:10 AM	Main Vac valve closed
8/3/2010	6:37:10 AM	Bypass valve closed
8/3/2010	6:37:10 AM	Bubbler valve closed
8/3/2010	6:37:10 AM	Helium valve opened
8/3/2010	6:37:10 AM	Helium MFC set to  500.000000
8/3/2010	6:37:10 AM	H2 MFC set to  0.000000
8/3/2010	6:37:10 AM	BCl3 MFC set to  0.000000
8/3/2010	6:37:10 AM	PHl3 MFC set to  0.000000
8/3/2010	6:37:10 AM	SiCl4 MFC set to  0.000000
8/3/2010	6:37:10 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	6:37:10 AM	Tube furnace set to 0
8/3/2010	6:37:11 AM	Helium valve closed
8/3/2010	6:37:11 AM	H2 valve closed
8/3/2010	6:37:11 AM	BCl3 valve closed
8/3/2010	6:37:11 AM	PH3 valve closed
8/3/2010	6:37:11 AM	SiCl4 pre valve closed
8/3/2010	6:37:11 AM	SiCl4 post valve closed
8/3/2010	6:37:11 AM	Main Vac valve closed
8/3/2010	6:37:11 AM	Bypass valve closed
8/3/2010	6:37:11 AM	Bubbler valve closed
8/3/2010	6:37:11 AM	Helium MFC set to  0.000000
8/3/2010	6:37:11 AM	H2 MFC set to  0.000000
8/3/2010	6:37:11 AM	BCl3 MFC set to  0.000000
8/3/2010	6:37:11 AM	PHl3 MFC set to  0.000000
8/3/2010	6:37:11 AM	SiCl4 MFC set to  0.000000
8/3/2010	6:37:11 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	6:37:11 AM	Tube furnace set to 0
8/3/2010	6:37:12 AM	Run finished at 6:37 AM
8/3/2010	6:37:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2010	6:42:16 AM	Bypass valve opened
8/3/2010	6:42:35 AM	Main Vac valve opened
8/3/2010	6:42:39 AM	Main Vac valve closed
8/3/2010	6:42:40 AM	Bypass valve closed
8/3/2010	7:15:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2010	7:15:28 AM	Recipe started at 7:15 AM
8/3/2010	7:15:28 AM	Helium valve closed
8/3/2010	7:15:28 AM	H2 valve closed
8/3/2010	7:15:28 AM	BCl3 valve closed
8/3/2010	7:15:28 AM	PH3 valve closed
8/3/2010	7:15:28 AM	SiCl4 pre valve closed
8/3/2010	7:15:28 AM	SiCl4 post valve closed
8/3/2010	7:15:28 AM	Main Vac valve closed
8/3/2010	7:15:28 AM	Bubbler valve closed
8/3/2010	7:15:28 AM	Bypass valve opened
8/3/2010	7:15:28 AM	Helium MFC set to  0.000000
8/3/2010	7:15:28 AM	H2 MFC set to  0.000000
8/3/2010	7:15:28 AM	BCl3 MFC set to  0.000000
8/3/2010	7:15:28 AM	PHl3 MFC set to  0.000000
8/3/2010	7:15:28 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:15:28 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:15:28 AM	Tube furnace set to 0
8/3/2010	7:16:11 AM	Helium valve closed
8/3/2010	7:16:11 AM	H2 valve closed
8/3/2010	7:16:11 AM	BCl3 valve closed
8/3/2010	7:16:11 AM	PH3 valve closed
8/3/2010	7:16:11 AM	SiCl4 pre valve closed
8/3/2010	7:16:11 AM	SiCl4 post valve closed
8/3/2010	7:16:11 AM	Bubbler valve closed
8/3/2010	7:16:11 AM	Main Vac valve opened
8/3/2010	7:16:11 AM	Bypass valve opened
8/3/2010	7:16:11 AM	Helium MFC set to  0.000000
8/3/2010	7:16:11 AM	H2 MFC set to  0.000000
8/3/2010	7:16:11 AM	BCl3 MFC set to  0.000000
8/3/2010	7:16:11 AM	PHl3 MFC set to  0.000000
8/3/2010	7:16:11 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:16:11 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:16:11 AM	Tube furnace set to 0
8/3/2010	7:16:12 AM	Run finished at 7:16 AM
8/3/2010	7:16:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2010	7:19:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/3/2010	7:19:48 AM	Recipe started at 7:19 AM
8/3/2010	7:19:48 AM	Helium valve closed
8/3/2010	7:19:48 AM	H2 valve closed
8/3/2010	7:19:48 AM	BCl3 valve closed
8/3/2010	7:19:48 AM	PH3 valve closed
8/3/2010	7:19:48 AM	SiCl4 pre valve closed
8/3/2010	7:19:48 AM	SiCl4 post valve closed
8/3/2010	7:19:48 AM	Main Vac valve closed
8/3/2010	7:19:48 AM	Bubbler valve closed
8/3/2010	7:19:48 AM	Bypass valve opened
8/3/2010	7:19:48 AM	Helium MFC set to  0.000000
8/3/2010	7:19:48 AM	H2 MFC set to  0.000000
8/3/2010	7:19:48 AM	BCl3 MFC set to  0.000000
8/3/2010	7:19:48 AM	PHl3 MFC set to  0.000000
8/3/2010	7:19:48 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:19:48 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:19:48 AM	Tube furnace set to 0
8/3/2010	7:19:48 AM	Helium valve closed
8/3/2010	7:19:48 AM	H2 valve closed
8/3/2010	7:19:48 AM	BCl3 valve closed
8/3/2010	7:19:48 AM	PH3 valve closed
8/3/2010	7:19:48 AM	SiCl4 pre valve closed
8/3/2010	7:19:48 AM	SiCl4 post valve closed
8/3/2010	7:19:48 AM	Bubbler valve closed
8/3/2010	7:19:48 AM	Main Vac valve opened
8/3/2010	7:19:48 AM	Bypass valve opened
8/3/2010	7:19:48 AM	Helium MFC set to  0.000000
8/3/2010	7:19:48 AM	H2 MFC set to  0.000000
8/3/2010	7:19:48 AM	BCl3 MFC set to  0.000000
8/3/2010	7:19:48 AM	PHl3 MFC set to  0.000000
8/3/2010	7:19:48 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:19:48 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:19:48 AM	Tube furnace set to 0
8/3/2010	7:19:52 AM	H2 valve closed
8/3/2010	7:19:52 AM	BCl3 valve closed
8/3/2010	7:19:52 AM	PH3 valve closed
8/3/2010	7:19:52 AM	SiCl4 pre valve closed
8/3/2010	7:19:52 AM	SiCl4 post valve closed
8/3/2010	7:19:52 AM	Bubbler valve closed
8/3/2010	7:19:52 AM	Helium valve opened
8/3/2010	7:19:52 AM	Main Vac valve opened
8/3/2010	7:19:52 AM	Bypass valve opened
8/3/2010	7:19:52 AM	Helium MFC set to  100.000000
8/3/2010	7:19:52 AM	H2 MFC set to  0.000000
8/3/2010	7:19:52 AM	BCl3 MFC set to  0.000000
8/3/2010	7:19:52 AM	PHl3 MFC set to  0.000000
8/3/2010	7:19:52 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:19:52 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:19:52 AM	Tube furnace set to 0
8/3/2010	7:28:52 AM	Helium valve closed
8/3/2010	7:28:52 AM	H2 valve closed
8/3/2010	7:28:52 AM	BCl3 valve closed
8/3/2010	7:28:52 AM	PH3 valve closed
8/3/2010	7:28:52 AM	SiCl4 pre valve closed
8/3/2010	7:28:52 AM	SiCl4 post valve closed
8/3/2010	7:28:52 AM	Bubbler valve closed
8/3/2010	7:28:52 AM	Main Vac valve opened
8/3/2010	7:28:52 AM	Bypass valve opened
8/3/2010	7:28:52 AM	Helium MFC set to  0.000000
8/3/2010	7:28:52 AM	H2 MFC set to  0.000000
8/3/2010	7:28:52 AM	BCl3 MFC set to  0.000000
8/3/2010	7:28:52 AM	PHl3 MFC set to  0.000000
8/3/2010	7:28:52 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:28:52 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:28:52 AM	Tube furnace set to 0
8/3/2010	7:29:52 AM	H2 valve closed
8/3/2010	7:29:52 AM	BCl3 valve closed
8/3/2010	7:29:52 AM	PH3 valve closed
8/3/2010	7:29:52 AM	SiCl4 pre valve closed
8/3/2010	7:29:52 AM	SiCl4 post valve closed
8/3/2010	7:29:52 AM	Bubbler valve closed
8/3/2010	7:29:52 AM	Helium valve opened
8/3/2010	7:29:52 AM	Main Vac valve opened
8/3/2010	7:29:52 AM	Bypass valve opened
8/3/2010	7:29:52 AM	Helium MFC set to  100.000000
8/3/2010	7:29:52 AM	H2 MFC set to  0.000000
8/3/2010	7:29:52 AM	BCl3 MFC set to  0.000000
8/3/2010	7:29:52 AM	PHl3 MFC set to  0.000000
8/3/2010	7:29:52 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:29:52 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:29:52 AM	Tube furnace set to 0
8/3/2010	7:38:52 AM	Helium valve closed
8/3/2010	7:38:52 AM	H2 valve closed
8/3/2010	7:38:52 AM	BCl3 valve closed
8/3/2010	7:38:52 AM	PH3 valve closed
8/3/2010	7:38:52 AM	SiCl4 pre valve closed
8/3/2010	7:38:52 AM	SiCl4 post valve closed
8/3/2010	7:38:52 AM	Bubbler valve closed
8/3/2010	7:38:52 AM	Main Vac valve opened
8/3/2010	7:38:52 AM	Bypass valve opened
8/3/2010	7:38:52 AM	Helium MFC set to  0.000000
8/3/2010	7:38:52 AM	H2 MFC set to  0.000000
8/3/2010	7:38:52 AM	BCl3 MFC set to  0.000000
8/3/2010	7:38:52 AM	PHl3 MFC set to  0.000000
8/3/2010	7:38:52 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:38:52 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:38:53 AM	Tube furnace set to 0
8/3/2010	7:39:53 AM	H2 valve closed
8/3/2010	7:39:53 AM	BCl3 valve closed
8/3/2010	7:39:53 AM	PH3 valve closed
8/3/2010	7:39:53 AM	SiCl4 pre valve closed
8/3/2010	7:39:53 AM	SiCl4 post valve closed
8/3/2010	7:39:53 AM	Bubbler valve closed
8/3/2010	7:39:53 AM	Helium valve opened
8/3/2010	7:39:53 AM	Main Vac valve opened
8/3/2010	7:39:53 AM	Bypass valve opened
8/3/2010	7:39:53 AM	Helium MFC set to  100.000000
8/3/2010	7:39:53 AM	H2 MFC set to  0.000000
8/3/2010	7:39:53 AM	BCl3 MFC set to  0.000000
8/3/2010	7:39:53 AM	PHl3 MFC set to  0.000000
8/3/2010	7:39:53 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:39:53 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:39:53 AM	Tube furnace set to 0
8/3/2010	7:48:53 AM	Helium valve closed
8/3/2010	7:48:53 AM	H2 valve closed
8/3/2010	7:48:53 AM	BCl3 valve closed
8/3/2010	7:48:53 AM	PH3 valve closed
8/3/2010	7:48:53 AM	SiCl4 pre valve closed
8/3/2010	7:48:53 AM	SiCl4 post valve closed
8/3/2010	7:48:53 AM	Bubbler valve closed
8/3/2010	7:48:53 AM	Main Vac valve opened
8/3/2010	7:48:53 AM	Bypass valve opened
8/3/2010	7:48:53 AM	Helium MFC set to  0.000000
8/3/2010	7:48:53 AM	H2 MFC set to  0.000000
8/3/2010	7:48:53 AM	BCl3 MFC set to  0.000000
8/3/2010	7:48:53 AM	PHl3 MFC set to  0.000000
8/3/2010	7:48:53 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:48:53 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:48:53 AM	Tube furnace set to 0
8/3/2010	7:48:54 AM	Run finished at 7:48 AM
8/3/2010	7:48:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/3/2010	7:53:46 AM	Recipe started at 7:53 AM
8/3/2010	7:53:46 AM	Helium valve closed
8/3/2010	7:53:46 AM	H2 valve closed
8/3/2010	7:53:46 AM	BCl3 valve closed
8/3/2010	7:53:46 AM	PH3 valve closed
8/3/2010	7:53:46 AM	SiCl4 pre valve closed
8/3/2010	7:53:46 AM	SiCl4 post valve closed
8/3/2010	7:53:46 AM	Main Vac valve closed
8/3/2010	7:53:46 AM	Bubbler valve closed
8/3/2010	7:53:46 AM	Bypass valve opened
8/3/2010	7:53:46 AM	Helium MFC set to  0.000000
8/3/2010	7:53:46 AM	H2 MFC set to  0.000000
8/3/2010	7:53:46 AM	BCl3 MFC set to  0.000000
8/3/2010	7:53:46 AM	PHl3 MFC set to  0.000000
8/3/2010	7:53:46 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:53:46 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:53:46 AM	Tube furnace set to 100
8/3/2010	7:53:46 AM	Helium valve closed
8/3/2010	7:53:46 AM	H2 valve closed
8/3/2010	7:53:46 AM	BCl3 valve closed
8/3/2010	7:53:46 AM	PH3 valve closed
8/3/2010	7:53:46 AM	SiCl4 pre valve closed
8/3/2010	7:53:46 AM	SiCl4 post valve closed
8/3/2010	7:53:46 AM	Bubbler valve closed
8/3/2010	7:53:46 AM	Main Vac valve opened
8/3/2010	7:53:46 AM	Bypass valve opened
8/3/2010	7:53:46 AM	Helium MFC set to  0.000000
8/3/2010	7:53:46 AM	H2 MFC set to  0.000000
8/3/2010	7:53:46 AM	BCl3 MFC set to  0.000000
8/3/2010	7:53:46 AM	PHl3 MFC set to  0.000000
8/3/2010	7:53:46 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:53:46 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:53:46 AM	Tube furnace set to 100
8/3/2010	7:53:51 AM	H2 valve closed
8/3/2010	7:53:51 AM	BCl3 valve closed
8/3/2010	7:53:51 AM	PH3 valve closed
8/3/2010	7:53:51 AM	SiCl4 pre valve closed
8/3/2010	7:53:51 AM	SiCl4 post valve closed
8/3/2010	7:53:51 AM	Bubbler valve closed
8/3/2010	7:53:51 AM	Helium valve opened
8/3/2010	7:53:51 AM	Main Vac valve opened
8/3/2010	7:53:51 AM	Bypass valve opened
8/3/2010	7:53:51 AM	Helium MFC set to  100.000000
8/3/2010	7:53:51 AM	H2 MFC set to  0.000000
8/3/2010	7:53:51 AM	BCl3 MFC set to  0.000000
8/3/2010	7:53:51 AM	PHl3 MFC set to  0.000000
8/3/2010	7:53:51 AM	SiCl4 MFC set to  0.000000
8/3/2010	7:53:51 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	7:53:51 AM	Tube furnace set to 100
8/3/2010	8:02:51 AM	Helium valve closed
8/3/2010	8:02:51 AM	H2 valve closed
8/3/2010	8:02:51 AM	BCl3 valve closed
8/3/2010	8:02:51 AM	PH3 valve closed
8/3/2010	8:02:51 AM	SiCl4 pre valve closed
8/3/2010	8:02:51 AM	SiCl4 post valve closed
8/3/2010	8:02:51 AM	Bubbler valve closed
8/3/2010	8:02:51 AM	Main Vac valve opened
8/3/2010	8:02:51 AM	Bypass valve opened
8/3/2010	8:02:51 AM	Helium MFC set to  0.000000
8/3/2010	8:02:51 AM	H2 MFC set to  0.000000
8/3/2010	8:02:51 AM	BCl3 MFC set to  0.000000
8/3/2010	8:02:51 AM	PHl3 MFC set to  0.000000
8/3/2010	8:02:51 AM	SiCl4 MFC set to  0.000000
8/3/2010	8:02:51 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	8:02:51 AM	Tube furnace set to 100
8/3/2010	8:03:51 AM	H2 valve closed
8/3/2010	8:03:51 AM	BCl3 valve closed
8/3/2010	8:03:51 AM	PH3 valve closed
8/3/2010	8:03:51 AM	SiCl4 pre valve closed
8/3/2010	8:03:51 AM	SiCl4 post valve closed
8/3/2010	8:03:51 AM	Bubbler valve closed
8/3/2010	8:03:51 AM	Helium valve opened
8/3/2010	8:03:51 AM	Main Vac valve opened
8/3/2010	8:03:51 AM	Bypass valve opened
8/3/2010	8:03:51 AM	Helium MFC set to  100.000000
8/3/2010	8:03:51 AM	H2 MFC set to  0.000000
8/3/2010	8:03:51 AM	BCl3 MFC set to  0.000000
8/3/2010	8:03:51 AM	PHl3 MFC set to  0.000000
8/3/2010	8:03:51 AM	SiCl4 MFC set to  0.000000
8/3/2010	8:03:51 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	8:03:51 AM	Tube furnace set to 100
8/3/2010	8:12:51 AM	Helium valve closed
8/3/2010	8:12:51 AM	H2 valve closed
8/3/2010	8:12:51 AM	BCl3 valve closed
8/3/2010	8:12:51 AM	PH3 valve closed
8/3/2010	8:12:51 AM	SiCl4 pre valve closed
8/3/2010	8:12:51 AM	SiCl4 post valve closed
8/3/2010	8:12:51 AM	Bubbler valve closed
8/3/2010	8:12:51 AM	Main Vac valve opened
8/3/2010	8:12:51 AM	Bypass valve opened
8/3/2010	8:12:51 AM	Helium MFC set to  0.000000
8/3/2010	8:12:51 AM	H2 MFC set to  0.000000
8/3/2010	8:12:51 AM	BCl3 MFC set to  0.000000
8/3/2010	8:12:51 AM	PHl3 MFC set to  0.000000
8/3/2010	8:12:51 AM	SiCl4 MFC set to  0.000000
8/3/2010	8:12:51 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	8:12:51 AM	Tube furnace set to 100
8/3/2010	8:13:51 AM	H2 valve closed
8/3/2010	8:13:51 AM	BCl3 valve closed
8/3/2010	8:13:51 AM	PH3 valve closed
8/3/2010	8:13:51 AM	SiCl4 pre valve closed
8/3/2010	8:13:51 AM	SiCl4 post valve closed
8/3/2010	8:13:51 AM	Bubbler valve closed
8/3/2010	8:13:51 AM	Helium valve opened
8/3/2010	8:13:51 AM	Main Vac valve opened
8/3/2010	8:13:51 AM	Bypass valve opened
8/3/2010	8:13:51 AM	Helium MFC set to  100.000000
8/3/2010	8:13:51 AM	H2 MFC set to  0.000000
8/3/2010	8:13:52 AM	BCl3 MFC set to  0.000000
8/3/2010	8:13:52 AM	PHl3 MFC set to  0.000000
8/3/2010	8:13:52 AM	SiCl4 MFC set to  0.000000
8/3/2010	8:13:52 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	8:13:52 AM	Tube furnace set to 100
8/3/2010	8:17:59 AM	Helium valve closed
8/3/2010	8:17:59 AM	H2 valve closed
8/3/2010	8:17:59 AM	BCl3 valve closed
8/3/2010	8:17:59 AM	PH3 valve closed
8/3/2010	8:17:59 AM	SiCl4 pre valve closed
8/3/2010	8:17:59 AM	SiCl4 post valve closed
8/3/2010	8:17:59 AM	Bubbler valve closed
8/3/2010	8:17:59 AM	Main Vac valve opened
8/3/2010	8:17:59 AM	Bypass valve opened
8/3/2010	8:17:59 AM	Helium MFC set to  0.000000
8/3/2010	8:17:59 AM	H2 MFC set to  0.000000
8/3/2010	8:17:59 AM	BCl3 MFC set to  0.000000
8/3/2010	8:17:59 AM	PHl3 MFC set to  0.000000
8/3/2010	8:17:59 AM	SiCl4 MFC set to  0.000000
8/3/2010	8:17:59 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	8:17:59 AM	Tube furnace set to 100
8/3/2010	8:18:41 AM	Run aborted at 8:18 AM
8/3/2010	8:18:41 AM	Helium valve closed
8/3/2010	8:18:41 AM	H2 valve closed
8/3/2010	8:18:41 AM	BCl3 valve closed
8/3/2010	8:18:41 AM	PH3 valve closed
8/3/2010	8:18:41 AM	SiCl4 pre valve closed
8/3/2010	8:18:41 AM	SiCl4 post valve closed
8/3/2010	8:18:41 AM	Bypass valve closed
8/3/2010	8:18:41 AM	Main Vac valve closed
8/3/2010	8:18:41 AM	Bubbler valve closed
8/3/2010	8:18:41 AM	Helium MFC set to  0.000000
8/3/2010	8:18:41 AM	H2 MFC set to  0.000000
8/3/2010	8:18:41 AM	BCl3 MFC set to  0.000000
8/3/2010	8:18:41 AM	PHl3 MFC set to  0.000000
8/3/2010	8:18:41 AM	SiCl4 MFC set to  0.000000
8/3/2010	8:18:41 AM	Tube furnace set to 0
8/3/2010	8:18:43 AM	Bypass valve opened
8/3/2010	8:18:44 AM	Main Vac valve opened
8/3/2010	8:18:48 AM	Bypass valve closed
8/3/2010	8:18:48 AM	Main Vac valve closed
8/3/2010	8:18:57 AM	Bypass valve opened
8/3/2010	8:18:57 AM	Main Vac valve opened
8/3/2010	8:19:26 AM	Helium MFC set to  100.000000
8/3/2010	8:19:27 AM	Helium valve opened
8/3/2010	8:19:55 AM	Helium MFC set to  0.000000
8/3/2010	8:19:56 AM	Helium valve closed
8/3/2010	8:20:51 AM	Recipe started at 8:20 AM
8/3/2010	8:20:51 AM	Helium valve closed
8/3/2010	8:20:51 AM	BCl3 valve closed
8/3/2010	8:20:51 AM	PH3 valve closed
8/3/2010	8:20:51 AM	SiCl4 pre valve closed
8/3/2010	8:20:51 AM	SiCl4 post valve closed
8/3/2010	8:20:51 AM	Main Vac valve closed
8/3/2010	8:20:51 AM	Bypass valve closed
8/3/2010	8:20:51 AM	Bubbler valve closed
8/3/2010	8:20:51 AM	H2 valve opened
8/3/2010	8:20:51 AM	Helium MFC set to  0.000000
8/3/2010	8:20:51 AM	H2 MFC set to  500.000000
8/3/2010	8:20:51 AM	BCl3 MFC set to  0.000000
8/3/2010	8:20:51 AM	PHl3 MFC set to  0.000000
8/3/2010	8:20:51 AM	SiCl4 MFC set to  0.000000
8/3/2010	8:20:51 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	8:20:51 AM	Tube furnace set to 0
8/3/2010	8:22:11 AM	Helium valve closed
8/3/2010	8:22:11 AM	BCl3 valve closed
8/3/2010	8:22:11 AM	PH3 valve closed
8/3/2010	8:22:11 AM	SiCl4 pre valve closed
8/3/2010	8:22:11 AM	SiCl4 post valve closed
8/3/2010	8:22:11 AM	Main Vac valve closed
8/3/2010	8:22:11 AM	Bypass valve closed
8/3/2010	8:22:11 AM	H2 valve opened
8/3/2010	8:22:11 AM	Bubbler valve opened
8/3/2010	8:22:11 AM	Helium MFC set to  0.000000
8/3/2010	8:22:11 AM	H2 MFC set to  500.000000
8/3/2010	8:22:11 AM	BCl3 MFC set to  0.000000
8/3/2010	8:22:11 AM	PHl3 MFC set to  0.000000
8/3/2010	8:22:11 AM	SiCl4 MFC set to  0.000000
8/3/2010	8:22:11 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	8:22:11 AM	Tube furnace set to 1000
8/3/2010	8:42:11 AM	Helium valve closed
8/3/2010	8:42:11 AM	BCl3 valve closed
8/3/2010	8:42:11 AM	PH3 valve closed
8/3/2010	8:42:11 AM	Main Vac valve closed
8/3/2010	8:42:11 AM	Bypass valve closed
8/3/2010	8:42:11 AM	H2 valve opened
8/3/2010	8:42:11 AM	SiCl4 pre valve opened
8/3/2010	8:42:11 AM	SiCl4 post valve opened
8/3/2010	8:42:11 AM	Bubbler valve opened
8/3/2010	8:42:11 AM	Helium MFC set to  0.000000
8/3/2010	8:42:11 AM	H2 MFC set to  500.000000
8/3/2010	8:42:11 AM	BCl3 MFC set to  0.000000
8/3/2010	8:42:11 AM	PHl3 MFC set to  0.000000
8/3/2010	8:42:11 AM	SiCl4 MFC set to  50.000000
8/3/2010	8:42:11 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	8:42:11 AM	Tube furnace set to 1000
8/3/2010	9:02:11 AM	H2 valve closed
8/3/2010	9:02:11 AM	BCl3 valve closed
8/3/2010	9:02:11 AM	PH3 valve closed
8/3/2010	9:02:11 AM	SiCl4 pre valve closed
8/3/2010	9:02:11 AM	SiCl4 post valve closed
8/3/2010	9:02:11 AM	Main Vac valve closed
8/3/2010	9:02:11 AM	Bypass valve closed
8/3/2010	9:02:11 AM	Helium valve opened
8/3/2010	9:02:11 AM	Bubbler valve opened
8/3/2010	9:02:11 AM	Helium MFC set to  500.000000
8/3/2010	9:02:11 AM	H2 MFC set to  0.000000
8/3/2010	9:02:11 AM	BCl3 MFC set to  0.000000
8/3/2010	9:02:11 AM	PHl3 MFC set to  0.000000
8/3/2010	9:02:11 AM	SiCl4 MFC set to  0.000000
8/3/2010	9:02:11 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	9:02:11 AM	Tube furnace set to 750
8/3/2010	9:22:11 AM	H2 valve closed
8/3/2010	9:22:11 AM	BCl3 valve closed
8/3/2010	9:22:11 AM	PH3 valve closed
8/3/2010	9:22:11 AM	SiCl4 pre valve closed
8/3/2010	9:22:11 AM	SiCl4 post valve closed
8/3/2010	9:22:11 AM	Main Vac valve closed
8/3/2010	9:22:11 AM	Bypass valve closed
8/3/2010	9:22:11 AM	Helium valve opened
8/3/2010	9:22:11 AM	Bubbler valve opened
8/3/2010	9:22:11 AM	Helium MFC set to  500.000000
8/3/2010	9:22:11 AM	H2 MFC set to  0.000000
8/3/2010	9:22:11 AM	BCl3 MFC set to  0.000000
8/3/2010	9:22:11 AM	PHl3 MFC set to  0.000000
8/3/2010	9:22:11 AM	SiCl4 MFC set to  0.000000
8/3/2010	9:22:11 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	9:22:11 AM	Tube furnace set to 0
8/3/2010	9:42:11 AM	Helium valve closed
8/3/2010	9:42:11 AM	H2 valve closed
8/3/2010	9:42:11 AM	BCl3 valve closed
8/3/2010	9:42:11 AM	PH3 valve closed
8/3/2010	9:42:11 AM	SiCl4 pre valve closed
8/3/2010	9:42:11 AM	SiCl4 post valve closed
8/3/2010	9:42:11 AM	Main Vac valve closed
8/3/2010	9:42:11 AM	Bypass valve closed
8/3/2010	9:42:11 AM	Bubbler valve closed
8/3/2010	9:42:11 AM	Helium MFC set to  0.000000
8/3/2010	9:42:11 AM	H2 MFC set to  0.000000
8/3/2010	9:42:11 AM	BCl3 MFC set to  0.000000
8/3/2010	9:42:11 AM	PHl3 MFC set to  0.000000
8/3/2010	9:42:11 AM	SiCl4 MFC set to  0.000000
8/3/2010	9:42:11 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	9:42:11 AM	Tube furnace set to 0
8/3/2010	9:42:12 AM	Run finished at 9:42 AM
8/3/2010	9:51:37 AM	Helium MFC set to  100.000000
8/3/2010	9:51:38 AM	Helium valve opened
8/3/2010	9:51:54 AM	Bubbler valve opened
8/3/2010	10:05:30 AM	Bubbler valve closed
8/3/2010	10:05:32 AM	Helium valve closed
8/3/2010	10:05:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2010	10:05:39 AM	Recipe started at 10:05 AM
8/3/2010	10:05:39 AM	Helium valve closed
8/3/2010	10:05:39 AM	H2 valve closed
8/3/2010	10:05:39 AM	BCl3 valve closed
8/3/2010	10:05:39 AM	PH3 valve closed
8/3/2010	10:05:39 AM	SiCl4 pre valve closed
8/3/2010	10:05:39 AM	SiCl4 post valve closed
8/3/2010	10:05:39 AM	Main Vac valve closed
8/3/2010	10:05:39 AM	Bubbler valve closed
8/3/2010	10:05:39 AM	Bypass valve opened
8/3/2010	10:05:39 AM	Helium MFC set to  0.000000
8/3/2010	10:05:39 AM	H2 MFC set to  0.000000
8/3/2010	10:05:39 AM	BCl3 MFC set to  0.000000
8/3/2010	10:05:39 AM	PHl3 MFC set to  0.000000
8/3/2010	10:05:39 AM	SiCl4 MFC set to  0.000000
8/3/2010	10:05:39 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	10:05:39 AM	Tube furnace set to 0
8/3/2010	10:06:16 AM	Helium valve closed
8/3/2010	10:06:16 AM	H2 valve closed
8/3/2010	10:06:16 AM	BCl3 valve closed
8/3/2010	10:06:16 AM	PH3 valve closed
8/3/2010	10:06:16 AM	SiCl4 pre valve closed
8/3/2010	10:06:16 AM	SiCl4 post valve closed
8/3/2010	10:06:16 AM	Bubbler valve closed
8/3/2010	10:06:16 AM	Main Vac valve opened
8/3/2010	10:06:16 AM	Bypass valve opened
8/3/2010	10:06:16 AM	Helium MFC set to  0.000000
8/3/2010	10:06:16 AM	H2 MFC set to  0.000000
8/3/2010	10:06:16 AM	BCl3 MFC set to  0.000000
8/3/2010	10:06:16 AM	PHl3 MFC set to  0.000000
8/3/2010	10:06:16 AM	SiCl4 MFC set to  0.000000
8/3/2010	10:06:16 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	10:06:16 AM	Tube furnace set to 0
8/3/2010	10:06:16 AM	Run finished at 10:06 AM
8/3/2010	10:06:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2010	10:07:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/3/2010	10:07:32 AM	Recipe started at 10:07 AM
8/3/2010	10:07:32 AM	Helium valve closed
8/3/2010	10:07:32 AM	H2 valve closed
8/3/2010	10:07:32 AM	BCl3 valve closed
8/3/2010	10:07:32 AM	PH3 valve closed
8/3/2010	10:07:32 AM	SiCl4 pre valve closed
8/3/2010	10:07:32 AM	SiCl4 post valve closed
8/3/2010	10:07:32 AM	Main Vac valve closed
8/3/2010	10:07:32 AM	Bubbler valve closed
8/3/2010	10:07:32 AM	Bypass valve opened
8/3/2010	10:07:32 AM	Helium MFC set to  0.000000
8/3/2010	10:07:32 AM	H2 MFC set to  0.000000
8/3/2010	10:07:32 AM	BCl3 MFC set to  0.000000
8/3/2010	10:07:32 AM	PHl3 MFC set to  0.000000
8/3/2010	10:07:32 AM	SiCl4 MFC set to  0.000000
8/3/2010	10:07:32 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	10:07:32 AM	Tube furnace set to 0
8/3/2010	10:07:32 AM	Helium valve closed
8/3/2010	10:07:32 AM	H2 valve closed
8/3/2010	10:07:32 AM	BCl3 valve closed
8/3/2010	10:07:32 AM	PH3 valve closed
8/3/2010	10:07:32 AM	SiCl4 pre valve closed
8/3/2010	10:07:32 AM	SiCl4 post valve closed
8/3/2010	10:07:32 AM	Bubbler valve closed
8/3/2010	10:07:32 AM	Main Vac valve opened
8/3/2010	10:07:32 AM	Bypass valve opened
8/3/2010	10:07:32 AM	Helium MFC set to  0.000000
8/3/2010	10:07:32 AM	H2 MFC set to  0.000000
8/3/2010	10:07:32 AM	BCl3 MFC set to  0.000000
8/3/2010	10:07:32 AM	PHl3 MFC set to  0.000000
8/3/2010	10:07:32 AM	SiCl4 MFC set to  0.000000
8/3/2010	10:07:32 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	10:07:32 AM	Tube furnace set to 0
8/3/2010	10:08:32 AM	H2 valve closed
8/3/2010	10:08:32 AM	BCl3 valve closed
8/3/2010	10:08:32 AM	PH3 valve closed
8/3/2010	10:08:32 AM	SiCl4 pre valve closed
8/3/2010	10:08:32 AM	SiCl4 post valve closed
8/3/2010	10:08:32 AM	Bubbler valve closed
8/3/2010	10:08:32 AM	Helium valve opened
8/3/2010	10:08:32 AM	Main Vac valve opened
8/3/2010	10:08:32 AM	Bypass valve opened
8/3/2010	10:08:32 AM	Helium MFC set to  100.000000
8/3/2010	10:08:32 AM	H2 MFC set to  0.000000
8/3/2010	10:08:32 AM	BCl3 MFC set to  0.000000
8/3/2010	10:08:32 AM	PHl3 MFC set to  0.000000
8/3/2010	10:08:32 AM	SiCl4 MFC set to  0.000000
8/3/2010	10:08:32 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	10:08:32 AM	Tube furnace set to 0
8/3/2010	10:17:32 AM	Helium valve closed
8/3/2010	10:17:32 AM	H2 valve closed
8/3/2010	10:17:32 AM	BCl3 valve closed
8/3/2010	10:17:32 AM	PH3 valve closed
8/3/2010	10:17:32 AM	SiCl4 pre valve closed
8/3/2010	10:17:32 AM	SiCl4 post valve closed
8/3/2010	10:17:32 AM	Bubbler valve closed
8/3/2010	10:17:32 AM	Main Vac valve opened
8/3/2010	10:17:32 AM	Bypass valve opened
8/3/2010	10:17:32 AM	Helium MFC set to  0.000000
8/3/2010	10:17:32 AM	H2 MFC set to  0.000000
8/3/2010	10:17:32 AM	BCl3 MFC set to  0.000000
8/3/2010	10:17:32 AM	PHl3 MFC set to  0.000000
8/3/2010	10:17:32 AM	SiCl4 MFC set to  0.000000
8/3/2010	10:17:32 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	10:17:33 AM	Tube furnace set to 0
8/3/2010	10:18:33 AM	H2 valve closed
8/3/2010	10:18:33 AM	BCl3 valve closed
8/3/2010	10:18:33 AM	PH3 valve closed
8/3/2010	10:18:33 AM	SiCl4 pre valve closed
8/3/2010	10:18:33 AM	SiCl4 post valve closed
8/3/2010	10:18:33 AM	Bubbler valve closed
8/3/2010	10:18:33 AM	Helium valve opened
8/3/2010	10:18:33 AM	Main Vac valve opened
8/3/2010	10:18:33 AM	Bypass valve opened
8/3/2010	10:18:33 AM	Helium MFC set to  100.000000
8/3/2010	10:18:33 AM	H2 MFC set to  0.000000
8/3/2010	10:18:33 AM	BCl3 MFC set to  0.000000
8/3/2010	10:18:33 AM	PHl3 MFC set to  0.000000
8/3/2010	10:18:33 AM	SiCl4 MFC set to  0.000000
8/3/2010	10:18:33 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	10:18:33 AM	Tube furnace set to 0
8/3/2010	10:27:33 AM	Helium valve closed
8/3/2010	10:27:33 AM	H2 valve closed
8/3/2010	10:27:33 AM	BCl3 valve closed
8/3/2010	10:27:33 AM	PH3 valve closed
8/3/2010	10:27:33 AM	SiCl4 pre valve closed
8/3/2010	10:27:33 AM	SiCl4 post valve closed
8/3/2010	10:27:33 AM	Bubbler valve closed
8/3/2010	10:27:33 AM	Main Vac valve opened
8/3/2010	10:27:33 AM	Bypass valve opened
8/3/2010	10:27:33 AM	Helium MFC set to  0.000000
8/3/2010	10:27:33 AM	H2 MFC set to  0.000000
8/3/2010	10:27:33 AM	BCl3 MFC set to  0.000000
8/3/2010	10:27:33 AM	PHl3 MFC set to  0.000000
8/3/2010	10:27:33 AM	SiCl4 MFC set to  0.000000
8/3/2010	10:27:33 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	10:27:33 AM	Tube furnace set to 0
8/3/2010	10:28:33 AM	H2 valve closed
8/3/2010	10:28:33 AM	BCl3 valve closed
8/3/2010	10:28:33 AM	PH3 valve closed
8/3/2010	10:28:33 AM	SiCl4 pre valve closed
8/3/2010	10:28:33 AM	SiCl4 post valve closed
8/3/2010	10:28:33 AM	Bubbler valve closed
8/3/2010	10:28:33 AM	Helium valve opened
8/3/2010	10:28:33 AM	Main Vac valve opened
8/3/2010	10:28:33 AM	Bypass valve opened
8/3/2010	10:28:33 AM	Helium MFC set to  100.000000
8/3/2010	10:28:33 AM	H2 MFC set to  0.000000
8/3/2010	10:28:33 AM	BCl3 MFC set to  0.000000
8/3/2010	10:28:33 AM	PHl3 MFC set to  0.000000
8/3/2010	10:28:33 AM	SiCl4 MFC set to  0.000000
8/3/2010	10:28:33 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	10:28:33 AM	Tube furnace set to 0
8/3/2010	10:37:33 AM	Helium valve closed
8/3/2010	10:37:33 AM	H2 valve closed
8/3/2010	10:37:33 AM	BCl3 valve closed
8/3/2010	10:37:33 AM	PH3 valve closed
8/3/2010	10:37:33 AM	SiCl4 pre valve closed
8/3/2010	10:37:33 AM	SiCl4 post valve closed
8/3/2010	10:37:33 AM	Bubbler valve closed
8/3/2010	10:37:33 AM	Main Vac valve opened
8/3/2010	10:37:33 AM	Bypass valve opened
8/3/2010	10:37:33 AM	Helium MFC set to  0.000000
8/3/2010	10:37:33 AM	H2 MFC set to  0.000000
8/3/2010	10:37:33 AM	BCl3 MFC set to  0.000000
8/3/2010	10:37:33 AM	PHl3 MFC set to  0.000000
8/3/2010	10:37:33 AM	SiCl4 MFC set to  0.000000
8/3/2010	10:37:33 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	10:37:33 AM	Tube furnace set to 0
8/3/2010	10:37:34 AM	Run finished at 10:37 AM
8/3/2010	10:37:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/3/2010	11:18:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/3/2010	11:18:07 AM	Recipe started at 11:18 AM
8/3/2010	11:18:07 AM	Helium valve closed
8/3/2010	11:18:07 AM	H2 valve closed
8/3/2010	11:18:07 AM	BCl3 valve closed
8/3/2010	11:18:07 AM	PH3 valve closed
8/3/2010	11:18:07 AM	SiCl4 pre valve closed
8/3/2010	11:18:07 AM	SiCl4 post valve closed
8/3/2010	11:18:07 AM	Main Vac valve closed
8/3/2010	11:18:07 AM	Bubbler valve closed
8/3/2010	11:18:07 AM	Bypass valve opened
8/3/2010	11:18:07 AM	Helium MFC set to  0.000000
8/3/2010	11:18:07 AM	H2 MFC set to  0.000000
8/3/2010	11:18:07 AM	BCl3 MFC set to  0.000000
8/3/2010	11:18:07 AM	PHl3 MFC set to  0.000000
8/3/2010	11:18:07 AM	SiCl4 MFC set to  0.000000
8/3/2010	11:18:07 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	11:18:07 AM	Tube furnace set to 0
8/3/2010	11:18:07 AM	Helium valve closed
8/3/2010	11:18:07 AM	H2 valve closed
8/3/2010	11:18:07 AM	BCl3 valve closed
8/3/2010	11:18:07 AM	PH3 valve closed
8/3/2010	11:18:07 AM	SiCl4 pre valve closed
8/3/2010	11:18:07 AM	SiCl4 post valve closed
8/3/2010	11:18:07 AM	Bubbler valve closed
8/3/2010	11:18:07 AM	Main Vac valve opened
8/3/2010	11:18:07 AM	Bypass valve opened
8/3/2010	11:18:07 AM	Helium MFC set to  0.000000
8/3/2010	11:18:07 AM	H2 MFC set to  0.000000
8/3/2010	11:18:07 AM	BCl3 MFC set to  0.000000
8/3/2010	11:18:07 AM	PHl3 MFC set to  0.000000
8/3/2010	11:18:07 AM	SiCl4 MFC set to  0.000000
8/3/2010	11:18:07 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	11:18:07 AM	Tube furnace set to 0
8/3/2010	11:18:15 AM	H2 valve closed
8/3/2010	11:18:15 AM	BCl3 valve closed
8/3/2010	11:18:15 AM	PH3 valve closed
8/3/2010	11:18:15 AM	SiCl4 pre valve closed
8/3/2010	11:18:15 AM	SiCl4 post valve closed
8/3/2010	11:18:15 AM	Bubbler valve closed
8/3/2010	11:18:15 AM	Helium valve opened
8/3/2010	11:18:15 AM	Main Vac valve opened
8/3/2010	11:18:15 AM	Bypass valve opened
8/3/2010	11:18:15 AM	Helium MFC set to  100.000000
8/3/2010	11:18:15 AM	H2 MFC set to  0.000000
8/3/2010	11:18:15 AM	BCl3 MFC set to  0.000000
8/3/2010	11:18:15 AM	PHl3 MFC set to  0.000000
8/3/2010	11:18:15 AM	SiCl4 MFC set to  0.000000
8/3/2010	11:18:15 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	11:18:15 AM	Tube furnace set to 0
8/3/2010	11:22:56 AM	Run aborted at 11:22 AM
8/3/2010	11:22:56 AM	Helium valve closed
8/3/2010	11:22:56 AM	H2 valve closed
8/3/2010	11:22:56 AM	BCl3 valve closed
8/3/2010	11:22:56 AM	PH3 valve closed
8/3/2010	11:22:56 AM	SiCl4 pre valve closed
8/3/2010	11:22:56 AM	SiCl4 post valve closed
8/3/2010	11:22:56 AM	Bypass valve closed
8/3/2010	11:22:56 AM	Main Vac valve closed
8/3/2010	11:22:56 AM	Bubbler valve closed
8/3/2010	11:22:56 AM	Helium MFC set to  0.000000
8/3/2010	11:22:56 AM	H2 MFC set to  0.000000
8/3/2010	11:22:56 AM	BCl3 MFC set to  0.000000
8/3/2010	11:22:56 AM	PHl3 MFC set to  0.000000
8/3/2010	11:22:56 AM	SiCl4 MFC set to  0.000000
8/3/2010	11:22:56 AM	Tube furnace set to 0
8/3/2010	11:22:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/3/2010	11:23:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2010	11:23:01 AM	Recipe started at 11:23 AM
8/3/2010	11:23:01 AM	Helium valve closed
8/3/2010	11:23:01 AM	H2 valve closed
8/3/2010	11:23:01 AM	BCl3 valve closed
8/3/2010	11:23:01 AM	PH3 valve closed
8/3/2010	11:23:01 AM	SiCl4 pre valve closed
8/3/2010	11:23:01 AM	SiCl4 post valve closed
8/3/2010	11:23:01 AM	Main Vac valve closed
8/3/2010	11:23:01 AM	Bubbler valve closed
8/3/2010	11:23:01 AM	Bypass valve opened
8/3/2010	11:23:01 AM	Helium MFC set to  0.000000
8/3/2010	11:23:01 AM	H2 MFC set to  0.000000
8/3/2010	11:23:01 AM	BCl3 MFC set to  0.000000
8/3/2010	11:23:01 AM	PHl3 MFC set to  0.000000
8/3/2010	11:23:01 AM	SiCl4 MFC set to  0.000000
8/3/2010	11:23:01 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	11:23:01 AM	Tube furnace set to 0
8/3/2010	11:23:01 AM	Helium valve closed
8/3/2010	11:23:01 AM	H2 valve closed
8/3/2010	11:23:01 AM	BCl3 valve closed
8/3/2010	11:23:01 AM	PH3 valve closed
8/3/2010	11:23:01 AM	SiCl4 pre valve closed
8/3/2010	11:23:01 AM	SiCl4 post valve closed
8/3/2010	11:23:01 AM	Bubbler valve closed
8/3/2010	11:23:01 AM	Main Vac valve opened
8/3/2010	11:23:01 AM	Bypass valve opened
8/3/2010	11:23:01 AM	Helium MFC set to  0.000000
8/3/2010	11:23:01 AM	H2 MFC set to  0.000000
8/3/2010	11:23:01 AM	BCl3 MFC set to  0.000000
8/3/2010	11:23:01 AM	PHl3 MFC set to  0.000000
8/3/2010	11:23:01 AM	SiCl4 MFC set to  0.000000
8/3/2010	11:23:01 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	11:23:02 AM	Tube furnace set to 0
8/3/2010	11:23:02 AM	Run finished at 11:23 AM
8/3/2010	11:23:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/3/2010	11:36:40 AM	Recipe started at 11:36 AM
8/3/2010	11:36:40 AM	Helium valve closed
8/3/2010	11:36:40 AM	BCl3 valve closed
8/3/2010	11:36:40 AM	PH3 valve closed
8/3/2010	11:36:40 AM	SiCl4 pre valve closed
8/3/2010	11:36:40 AM	SiCl4 post valve closed
8/3/2010	11:36:40 AM	Main Vac valve closed
8/3/2010	11:36:40 AM	Bypass valve closed
8/3/2010	11:36:40 AM	Bubbler valve closed
8/3/2010	11:36:40 AM	H2 valve opened
8/3/2010	11:36:40 AM	Helium MFC set to  0.000000
8/3/2010	11:36:40 AM	H2 MFC set to  500.000000
8/3/2010	11:36:40 AM	BCl3 MFC set to  0.000000
8/3/2010	11:36:40 AM	PHl3 MFC set to  0.000000
8/3/2010	11:36:40 AM	SiCl4 MFC set to  0.000000
8/3/2010	11:36:40 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	11:36:41 AM	Tube furnace set to 0
8/3/2010	11:38:00 AM	Helium valve closed
8/3/2010	11:38:00 AM	BCl3 valve closed
8/3/2010	11:38:00 AM	PH3 valve closed
8/3/2010	11:38:00 AM	SiCl4 pre valve closed
8/3/2010	11:38:00 AM	SiCl4 post valve closed
8/3/2010	11:38:00 AM	Main Vac valve closed
8/3/2010	11:38:00 AM	Bypass valve closed
8/3/2010	11:38:00 AM	H2 valve opened
8/3/2010	11:38:00 AM	Bubbler valve opened
8/3/2010	11:38:00 AM	Helium MFC set to  0.000000
8/3/2010	11:38:00 AM	H2 MFC set to  500.000000
8/3/2010	11:38:00 AM	BCl3 MFC set to  0.000000
8/3/2010	11:38:00 AM	PHl3 MFC set to  0.000000
8/3/2010	11:38:00 AM	SiCl4 MFC set to  0.000000
8/3/2010	11:38:00 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	11:38:00 AM	Tube furnace set to 1000
8/3/2010	11:58:00 AM	Helium valve closed
8/3/2010	11:58:00 AM	BCl3 valve closed
8/3/2010	11:58:00 AM	PH3 valve closed
8/3/2010	11:58:00 AM	Main Vac valve closed
8/3/2010	11:58:00 AM	Bypass valve closed
8/3/2010	11:58:00 AM	H2 valve opened
8/3/2010	11:58:00 AM	SiCl4 pre valve opened
8/3/2010	11:58:00 AM	SiCl4 post valve opened
8/3/2010	11:58:00 AM	Bubbler valve opened
8/3/2010	11:58:00 AM	Helium MFC set to  0.000000
8/3/2010	11:58:00 AM	H2 MFC set to  500.000000
8/3/2010	11:58:00 AM	BCl3 MFC set to  0.000000
8/3/2010	11:58:00 AM	PHl3 MFC set to  0.000000
8/3/2010	11:58:00 AM	SiCl4 MFC set to  50.000000
8/3/2010	11:58:00 AM	Bypass solenoid MFC set to  0.000000
8/3/2010	11:58:01 AM	Tube furnace set to 1000
8/3/2010	12:13:01 PM	H2 valve closed
8/3/2010	12:13:01 PM	BCl3 valve closed
8/3/2010	12:13:01 PM	PH3 valve closed
8/3/2010	12:13:01 PM	SiCl4 pre valve closed
8/3/2010	12:13:01 PM	SiCl4 post valve closed
8/3/2010	12:13:01 PM	Main Vac valve closed
8/3/2010	12:13:01 PM	Bypass valve closed
8/3/2010	12:13:01 PM	Helium valve opened
8/3/2010	12:13:01 PM	Bubbler valve opened
8/3/2010	12:13:01 PM	Helium MFC set to  500.000000
8/3/2010	12:13:01 PM	H2 MFC set to  0.000000
8/3/2010	12:13:01 PM	BCl3 MFC set to  0.000000
8/3/2010	12:13:01 PM	PHl3 MFC set to  0.000000
8/3/2010	12:13:01 PM	SiCl4 MFC set to  0.000000
8/3/2010	12:13:01 PM	Bypass solenoid MFC set to  0.000000
8/3/2010	12:13:01 PM	Tube furnace set to 750
8/3/2010	12:33:01 PM	H2 valve closed
8/3/2010	12:33:01 PM	BCl3 valve closed
8/3/2010	12:33:01 PM	PH3 valve closed
8/3/2010	12:33:01 PM	SiCl4 pre valve closed
8/3/2010	12:33:01 PM	SiCl4 post valve closed
8/3/2010	12:33:01 PM	Main Vac valve closed
8/3/2010	12:33:01 PM	Bypass valve closed
8/3/2010	12:33:01 PM	Helium valve opened
8/3/2010	12:33:01 PM	Bubbler valve opened
8/3/2010	12:33:01 PM	Helium MFC set to  500.000000
8/3/2010	12:33:01 PM	H2 MFC set to  0.000000
8/3/2010	12:33:01 PM	BCl3 MFC set to  0.000000
8/3/2010	12:33:01 PM	PHl3 MFC set to  0.000000
8/3/2010	12:33:01 PM	SiCl4 MFC set to  0.000000
8/3/2010	12:33:01 PM	Bypass solenoid MFC set to  0.000000
8/3/2010	12:33:01 PM	Tube furnace set to 0
8/3/2010	12:53:01 PM	Helium valve closed
8/3/2010	12:53:01 PM	H2 valve closed
8/3/2010	12:53:01 PM	BCl3 valve closed
8/3/2010	12:53:01 PM	PH3 valve closed
8/3/2010	12:53:01 PM	SiCl4 pre valve closed
8/3/2010	12:53:01 PM	SiCl4 post valve closed
8/3/2010	12:53:01 PM	Main Vac valve closed
8/3/2010	12:53:01 PM	Bypass valve closed
8/3/2010	12:53:01 PM	Bubbler valve closed
8/3/2010	12:53:01 PM	Helium MFC set to  0.000000
8/3/2010	12:53:01 PM	H2 MFC set to  0.000000
8/3/2010	12:53:01 PM	BCl3 MFC set to  0.000000
8/3/2010	12:53:01 PM	PHl3 MFC set to  0.000000
8/3/2010	12:53:01 PM	SiCl4 MFC set to  0.000000
8/3/2010	12:53:01 PM	Bypass solenoid MFC set to  0.000000
8/3/2010	12:53:01 PM	Tube furnace set to 0
8/3/2010	12:53:01 PM	Run finished at 12:53 PM
8/3/2010	3:51:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2010	3:51:04 PM	Recipe started at 3:51 PM
8/3/2010	3:51:04 PM	H2 valve closed
8/3/2010	3:51:04 PM	BCl3 valve closed
8/3/2010	3:51:04 PM	PH3 valve closed
8/3/2010	3:51:04 PM	SiCl4 pre valve closed
8/3/2010	3:51:04 PM	SiCl4 post valve closed
8/3/2010	3:51:04 PM	Main Vac valve closed
8/3/2010	3:51:04 PM	Bypass valve closed
8/3/2010	3:51:04 PM	Bubbler valve closed
8/3/2010	3:51:04 PM	Helium valve opened
8/3/2010	3:51:04 PM	Helium MFC set to  500.000000
8/3/2010	3:51:04 PM	H2 MFC set to  0.000000
8/3/2010	3:51:04 PM	BCl3 MFC set to  0.000000
8/3/2010	3:51:04 PM	PHl3 MFC set to  0.000000
8/3/2010	3:51:04 PM	SiCl4 MFC set to  0.000000
8/3/2010	3:51:04 PM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:51:05 PM	Tube furnace set to 0
8/3/2010	3:51:14 PM	Helium valve closed
8/3/2010	3:51:14 PM	H2 valve closed
8/3/2010	3:51:14 PM	BCl3 valve closed
8/3/2010	3:51:14 PM	PH3 valve closed
8/3/2010	3:51:14 PM	SiCl4 pre valve closed
8/3/2010	3:51:14 PM	SiCl4 post valve closed
8/3/2010	3:51:14 PM	Main Vac valve closed
8/3/2010	3:51:14 PM	Bypass valve closed
8/3/2010	3:51:14 PM	Bubbler valve closed
8/3/2010	3:51:14 PM	Helium MFC set to  0.000000
8/3/2010	3:51:14 PM	H2 MFC set to  0.000000
8/3/2010	3:51:14 PM	BCl3 MFC set to  0.000000
8/3/2010	3:51:14 PM	PHl3 MFC set to  0.000000
8/3/2010	3:51:14 PM	SiCl4 MFC set to  0.000000
8/3/2010	3:51:14 PM	Bypass solenoid MFC set to  0.000000
8/3/2010	3:51:14 PM	Tube furnace set to 0
8/3/2010	3:51:14 PM	Run finished at 3:51 PM
8/3/2010	3:51:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/3/2010	4:03:30 PM	Tube furnace set to 1000
8/3/2010	4:03:37 PM	Tube furnace set to 0
8/3/2010	4:07:35 PM	Bypass valve opened
8/3/2010	4:08:05 PM	Main Vac valve opened
8/3/2010	4:09:26 PM	Tube furnace set to 1000
8/3/2010	4:30:57 PM	Tube furnace set to 0
